Design of the Capacitive Dual-Mass Micromechanical Gyroscope
2022 ◽
Vol 1215
(1)
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pp. 012010
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Abstract Development of micromechanical inertial sensors have made it possible to use them in the navigation and motion control systems. This application area imposes strict requirements on sensors. One of the ways to meet the requirements and to improve the gyroscope characteristics is to apply a dual- or multi-mass architecture of a gyroscope sensing element. This paper presents the results of dual-mass micromechanical gyroscope with a measurement range of ±450°/s design. The complex design method, including simulation at the system level, model refinement based on the results of finite element modelling, and modelling of individual electronic blocks at the circuit level, is described.
2021 ◽
pp. 095440542110374
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2006 ◽
Vol 4
(4)
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pp. 511-515
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