ChemInform Abstract: The Characterization of Electron Cyclotron Resonance Plasma Deposited Silicon Nitride and Silicon Oxide Films
1989 ◽
Vol 136
(10)
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pp. 2835-2840
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2003 ◽
Vol 18
(7)
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pp. 633-641
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1998 ◽
1991 ◽
Vol 137-138
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pp. 859-862
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2007 ◽
Vol 25
(4)
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pp. 1166
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