ChemInform Abstract: Low-Temperature Metal-Organic Chemical Vapor Deposition of Silicon Nitride.
1990 ◽
Vol 73
(3)
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pp. 764-766
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1999 ◽
Vol 17
(3)
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pp. 1101
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1996 ◽
Vol 288
(1-2)
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pp. 116-119
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