A low-cost and reliable optical inspection system for rapid surface roughness measurements of polycrystalline thin films

2012 ◽  
Vol 43 (10) ◽  
pp. 878-885 ◽  
Author(s):  
C.-C. Kuo ◽  
P.-J. Huang
Optik ◽  
2013 ◽  
Vol 124 (14) ◽  
pp. 1902-1906 ◽  
Author(s):  
Chil-Chyuan Kuo ◽  
Yi-Ruei Chen ◽  
Cheng-Yi Tong ◽  
Jyh-Wei Lee

2011 ◽  
Vol 110-116 ◽  
pp. 831-838
Author(s):  
Chil Chyuan Kuo ◽  
Yi Ruei Chen

A rapid optical inspection system for rapid measuring the surface roughness of titanium dioxide (TiO2) thin films is developed in this work. The incident angle of 60° is a good candidate for measuring surface roughness of TiO2 thin films and y = 90.391x + 0.5123 is a trend equation for predicting the surface roughness of TiO2 thin films. Roughness average (Ra) of TiO2 thin films (y) can be directly deduced from the peak power density (x) using the optical inspection system developed. The results were verified by white-light interferometer. The best measurement error rate of the optical inspection system developed can be controlled about 8.8%.The saving in inspection time of the surface roughness of TiO2 thin films is up to 83%.


2016 ◽  
Vol 30 (2) ◽  
pp. 641-655 ◽  
Author(s):  
Chung-Feng Jeffrey Kuo ◽  
Tz-ying Fang ◽  
Chi-Lung Lee ◽  
Han-Cheng Wu

1996 ◽  
pp. 439-474
Author(s):  
A. R. Rao ◽  
N. Ramesh ◽  
F. Y. Wu ◽  
J. R. Mandeville ◽  
P. Kerstens

RSC Advances ◽  
2017 ◽  
Vol 7 (47) ◽  
pp. 29469-29480 ◽  
Author(s):  
Adel Chihi ◽  
Brahim Bessais

In this work, cerium doped CuInS2 (CIS) polycrystalline thin films with different Ce content are firstly synthesized on indium doped tin oxide (ITO) glass via a low-cost electrochemical technique.


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