Ga-doped ZnO transparent conducting films prepared by helicon-wave-excited plasma sputtering

2009 ◽  
Vol 6 (5) ◽  
pp. 1109-1111 ◽  
Author(s):  
Shingo Masaki ◽  
Hisayuki Nakanishi ◽  
Mutsumi Sugiyama ◽  
Shigefusa F. Chichibu
Keyword(s):  
Plasma Sputtering ◽  
Transparent Conducting Films ◽  
Transparent Conducting ◽  
Helicon Wave ◽  
Doped Zno

Helicon-wave-excited plasma sputtering deposition of Ga-doped ZnO transparent conducting films

2006 ◽  
Vol 203 (11) ◽  
pp. 2882-2886 ◽  
Author(s):  
Mutsumi Sugiyama ◽  
Akira Murayama ◽  
Takashi Imao ◽  
Keita Saiki ◽  
Hisayuki Nakanishi ◽  
...  
Keyword(s):  
Sputtering Deposition ◽  
Plasma Sputtering ◽  
Transparent Conducting Films ◽  
Transparent Conducting ◽  
Helicon Wave ◽  
Doped Zno

Tungsten-doped ZnO transparent conducting films deposited by direct current magnetron sputtering

Vacuum ◽  
2010 ◽  
Vol 85 (2) ◽  
pp. 184-186 ◽  
Author(s):  
Huafu Zhang ◽  
Hanfa Liu ◽  
Chengxin Lei ◽  
Changkun Yuan ◽  
Aiping Zhou
Keyword(s):  
Magnetron Sputtering ◽  
Direct Current ◽  
Transparent Conducting Films ◽  
Transparent Conducting ◽  
Direct Current Magnetron Sputtering ◽  
Doped Zno

Nb-doped ZnO transparent conducting films fabricated by pulsed laser deposition

2009 ◽  
Vol 255 (13-14) ◽  
pp. 6460-6463 ◽  
Author(s):  
J.M. Lin ◽  
Y.Z. Zhang ◽  
Z.Z. Ye ◽  
X.Q. Gu ◽  
X.H. Pan ◽  
...  
Keyword(s):  
Pulsed Laser Deposition ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
Transparent Conducting Films ◽  
Transparent Conducting ◽  
Doped Zno

Thermal evolution of point defects in indium doped ZnO transparent conducting films

2020 ◽  
Vol 713 ◽  
pp. 138350
Author(s):  
Wanjun Li ◽  
Hongxia Yin ◽  
Huilan Mo ◽  
Li Lai ◽  
Sijie Fu ◽  
...  
Keyword(s):  
Point Defects ◽  
Thermal Evolution ◽  
Transparent Conducting Films ◽  
Transparent Conducting ◽  
Doped Zno
Sign in / Sign up

Export Citation Format

Share Document