Laterally Ordered Sub-10 nm Features Obtained From Directed Self-Assembly of Si-Containing Block Copolymer Thin Films
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2019 ◽
Vol 6
(11)
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pp. 1970067
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2015 ◽
Vol 7
(5)
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pp. 3323-3328
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2013 ◽
Vol 26
(1)
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pp. 55-58
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