Ultra-precision lapping of machinable ceramic Si3N4-BN by in-process electrolytic dressing

2006 ◽  
Vol 31 (11-12) ◽  
pp. 1101-1108 ◽  
Author(s):  
E. S. Lee ◽  
J. K. Won ◽  
Y. J. Chun ◽  
M. W. Cho ◽  
W. S. Cho ◽  
...  
Keyword(s):  
Ultra Precision ◽  
Machinable Ceramic ◽  
Electrolytic Dressing

In-Process Electrolytic Dressing Lapping (IEDL) of Al2O3-BN Machinable Ceramics

2007 ◽  
pp. 1473-1476
Author(s):  
Eun Sang Lee ◽  
Y.J. Chun ◽  
J.Y. Jang ◽  
Myeong Woo Cho ◽  
Won Seung Cho ◽  
...  
Keyword(s):  
Electrolytic Dressing

Nanoprecision Micromechanical Fabrication

2008 ◽  
Vol 2 (1) ◽  
pp. 24-33 ◽  
Author(s):  
Hitoshi Ohmori ◽  
◽  
Weimin Lin ◽  
Yoshihiro Uehara ◽  
Yutaka Watanabe ◽  
...  
Keyword(s):  
Surface Quality ◽  
High Surface ◽  
Surface Grinding ◽  
Mirror Surface ◽  
Optical Components ◽  
High Surface Quality ◽  
Elid Grinding ◽  
Grinding Method ◽  
Electrolytic Dressing

ELID grinding is a method that realizes high quality mirror surface grinding in the nanometer order by use of electrolytic dressing metal bonded wheels consisting of fine abrasives. Currently, ELID grinding is increasingly being applied as an ultraprecision grinding method to achieve desired surface roughness, high surface accuracy, high surface quality, and high grinding performance. This paper introduces the ELID grinding and discusses some applications of ELID grinding to mirror surface grinding. For ultraprecision optical components, ultra fine smooth surface quality of sub-nanometer or sub-angstrom in Ra may be required. To satisfy these requirements, ultraprecision on machine measurement system had been developed. Synergistic the nano precision mechanical method, nano precision measurement method with nano resolution machine, the ultraprecision components can successful to fabricate.

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