Lithography by tapping-mode atomic force microscopy with electrostatic force modulation
2007 ◽
Vol 111
(9)
◽
pp. 2125-2129
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Keyword(s):
2007 ◽
Vol 78
(10)
◽
pp. 103707
◽
Keyword(s):
Keyword(s):
Keyword(s):
2005 ◽
pp. 141-148
Keyword(s):