In this experimental research, tungsten trioxide (WO3) thin films were deposited using ammonium tungstate ((NH4)2WO4) by a simple and cost-effective technique of spray pyrolysis on top of glass substrates. The surface morphology, structural and optical properties of prepared samples were studied using field emission scanning electron microscopy (FESEM), X-ray diffraction (XRD) pattern analysis and UV–Vis spectroscopy techniques, respectively. Studied deposition parameters were: substrate temperature (300, 350, 400, 450 and 500∘C), concentration of the precursor solution (0.01, 0.02, 0.04, 0.08, 0.1 and 0.2[Formula: see text]M), volume of the precursor solution (50, 100, 150 and 200[Formula: see text]mL) and the effect of pulsed spraying at different concentrations (0.01, 0.1 and 0.2[Formula: see text]M). FESEM images showed that the surface morphology has formed like nested micro-fibrous rings with a uniform distribution all over the surface. The XRD patterns revealed that increasing the solution concentration to 0.2[Formula: see text]M shows some peaks which can be attributed to WO3 with the hexagonal crystal structure. Transmission spectra of the samples indicate that all of the prepared samples are transparent in the visible range, with the calculated direct bandgap ranging from about 2.93[Formula: see text]eV to 3.96[Formula: see text]eV, depending on the deposition conditions.
Influence of the growth parameters of TiO2 thin films deposited by the MOCVD method