Precise Compensation for Positional Accuracy of Ultra-Precision Air-Bearing Motion Stage Based on the Self-Calibration Method

2021 ◽  
Author(s):  
Shengzhou Huang
Keyword(s):  
Calibration Method ◽  
The Self ◽  
Air Bearing ◽  
Positional Accuracy ◽  
Self Calibration ◽  
Ultra Precision ◽  
Motion Stage

The self-calibration method of IR mixer with low IF

2008 ◽  
Vol 55 (2) ◽  
pp. 115-124
Author(s):  
Andrzej Szymański ◽  
Ewa Kurjata-Pfitzner ◽  
Jan Lesiński ◽  
Jerzy Wąsowski
Keyword(s):  
Calibration Method ◽  
The Self ◽  
Self Calibration

Self-Calibration of Coupling Error for 3-DOF Displacement Measurement of Planar Working Stage Based on Two Planar Gratings

2017 ◽  
Vol 870 ◽  
pp. 135-140
Author(s):  
Yong Meng Liu ◽  
Ze Lin Li ◽  
De Hao Du ◽  
Mao Qiang Yuan ◽  
Jing Zhi Huang ◽  
...  
Keyword(s):  
Fourier Series ◽  
Calibration Method ◽  
Systematic Errors ◽  
Displacement Measurement ◽  
The Self ◽  
Experimental Results ◽  
Positioning Accuracy ◽  
Self Calibration ◽  
Coupling Error

A self-calibration method of coupling error is presented for 3-DOF displacement measurement of a planar moving stage based on two planar gratings. The self-calibration method using Fourier series is developed to extract the periodic systematic errors from the coupling errors. The extracted periodic systematic errors are compensated. Experiments are conducted to validate the validity of the self-calibration method and experimental results indicate that the coupling errors in x and y directions are reduced by 2 and 1.5 times respectively. It can be therefore concluded that the self-calibration method is suitable for the 3-DOF displacement measurement of a planar moving stage to improve the positioning accuracy.

A self-calibration method with high-accuracy and low-cost for large-area motion stage based on digital grating projection mode

2019 ◽  
Vol 12 (12) ◽  
pp. 126503
Author(s):  
Shengzhou Huang ◽  
Mujun Li ◽  
Lei Wang ◽  
Yongsheng Su ◽  
Yi Liang
Keyword(s):  
Low Cost ◽  
Calibration Method ◽  
High Accuracy ◽  
Large Area ◽  
Self Calibration ◽  
Motion Stage

scholarly journals First Detection of the GI-type of Intrinsic Alignments of Galaxies Using the Self-calibration Method in a Photometric Galaxy Survey

2020 ◽  
Vol 899 (1) ◽  
pp. L5
Author(s):  
Eske M. Pedersen ◽  
Ji Yao ◽  
Mustapha Ishak ◽  
Pengjie Zhang
Keyword(s):  
Calibration Method ◽  
The Self ◽  
Self Calibration

A flexible self-calibration method for large-stroke motion stage by using the multi-region stitching strategy based on least square algorithm

2020 ◽  
Vol 13 (5) ◽  
pp. 056501
Author(s):  
Shengzhou Huang ◽  
Mujun Li ◽  
Lei Wang ◽  
Yongsheng Su ◽  
Fengtao Wang ◽  
...  
Keyword(s):  
Calibration Method ◽  
Least Square ◽  
Self Calibration ◽  
Motion Stage

Phase Retardation Measurement of Wave plates Based on the Self-Calibration Method

2012 ◽  
Vol 39 (4) ◽  
pp. 0408007
Author(s):  
侯俊峰 Hou Junfeng ◽  
于佳 Yu Jia ◽  
王东光 Wang Dongguang ◽  
邓元勇 Deng Yuanyong ◽  
张志勇 Zhang Zhiyong ◽  
...  
Keyword(s):  
Calibration Method ◽  
The Self ◽  
Phase Retardation ◽  
Self Calibration
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