Thermodynamic analysis of metalorganic chemical vapour deposition of SiC using tetramethylsilane as precursor. I. Identification of the main reactions

1995 ◽  
Vol 148 (4) ◽  
pp. 383-389 ◽  
Author(s):  
S. Veintemillas ◽  
V. Madigou ◽  
R. Rodríguez-Clemente ◽  
A. Figueras
Keyword(s):  
Thermodynamic Analysis ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Metalorganic Chemical Vapour Deposition ◽  
Metalorganic Chemical

Complementary self-aligned laser by metalorganic chemical vapour deposition

1985 ◽  
Vol 21 (20) ◽  
pp. 903 ◽  
Author(s):  
L.J. Mawst ◽  
G. Costrini ◽  
C.A. Zmudzinski ◽  
M.E. Givens ◽  
M.A. Emanuel ◽  
...  
Keyword(s):  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Metalorganic Chemical Vapour Deposition ◽  
Metalorganic Chemical

AlInAs/GaInAs heterostructure bipolar transistors grown by metalorganic chemical vapour deposition

1989 ◽  
Vol 25 (22) ◽  
pp. 1496 ◽  
Author(s):  
B. Jalali ◽  
R.N. Nottenburg ◽  
W.S. Hobson ◽  
Y.K. Chen ◽  
T. Fullowan ◽  
...  
Keyword(s):  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Bipolar Transistors ◽  
Metalorganic Chemical Vapour Deposition ◽  
Metalorganic Chemical
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