IOTA, a new computer controlled thin film thickness measurement tool

Solid-State Electronics ◽

10.1016/0038-1101(72)90107-4 ◽

1972 ◽

Vol 15 (4) ◽

pp. 371-380 ◽

Author(s):

K.L. Konnerth ◽

F.H. Dill

Keyword(s):

Thin Film ◽

Film Thickness ◽

Thickness Measurement ◽

Measurement Tool ◽

Thin Film Thickness ◽

Computer Controlled ◽

Film Thickness Measurement

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Process check time reduction by the application of an in-line thin film thickness measurement tool

ISSM 2005, IEEE International Symposium on Semiconductor Manufacturing, 2005. ◽

10.1109/issm.2005.1513362 ◽

2005 ◽

Author(s):

K. Murata ◽

K. Saeki

Keyword(s):

Thin Film ◽

Film Thickness ◽

Thickness Measurement ◽

Measurement Tool ◽

Thin Film Thickness ◽

Time Reduction ◽

Film Thickness Measurement

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Multilayer thin film thickness measurement using sensitivity separation method

Optics Communications ◽

10.1016/j.optcom.2010.05.054 ◽

2010 ◽

Vol 283 (20) ◽

pp. 3989-3993 ◽

Author(s):

Xing-zhi Gong ◽

Liang Cheng ◽

Fei-hong Yu

Keyword(s):

Thin Film ◽

Film Thickness ◽

Thickness Measurement ◽

Separation Method ◽

Multilayer Thin Film ◽

Thin Film Thickness ◽

Film Thickness Measurement

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Spectroscopic thin film thickness measurement system for semiconductor industries

Conference Proceedings. 10th Anniversary. IMTC/94. Advanced Technologies in I & M. 1994 IEEE Instrumentation and Measurement Technolgy Conference (Cat. No.94CH3424-9) ◽

10.1109/imtc.1994.352008 ◽

2002 ◽

Author(s):

M. Horie ◽

N. Fujiwara ◽

M. Kokubo ◽

N. Kondo

Keyword(s):

Thin Film ◽

Film Thickness ◽

Measurement System ◽

Thickness Measurement ◽

Thin Film Thickness ◽

Film Thickness Measurement ◽

Thickness Measurement System

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Novel wide-angle ellipsometric arrangement for thin film thickness measurement

Journal of Physics Communications ◽

10.1088/2399-6528/aac084 ◽

2018 ◽

Vol 2 (5) ◽

pp. 055007

Author(s):

A W Abdallah ◽

R Tutsch ◽

N N Nagib

Keyword(s):

Thin Film ◽

Film Thickness ◽

Thickness Measurement ◽

Thin Film Thickness ◽

Film Thickness Measurement

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Processing technology of interferogram for thin film thickness measurement

10.1117/12.837583 ◽

2009 ◽

Author(s):

Jun-hong Su ◽

Jin-man Ge

Keyword(s):

Thin Film ◽

Film Thickness ◽

Thickness Measurement ◽

Processing Technology ◽

Thin Film Thickness ◽

Film Thickness Measurement

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Combined thin-film thickness measurement and surface metrology of photovoltaic thin films using Coherence Correlation Interferometry

2012 38th IEEE Photovoltaic Specialists Conference ◽

10.1109/pvsc.2012.6317648 ◽

2012 ◽

Author(s):

Biancamaria Maniscalco ◽

Piotr M. Kaminski ◽

John M. Walls

Keyword(s):

Thin Film ◽

Film Thickness ◽

Thickness Measurement ◽

Surface Metrology ◽

Thin Film Thickness ◽

Film Thickness Measurement

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Application of optical spectral interferometry for thin film thickness measurement

2016 9th International Kharkiv Symposium on Physics and Engineering of Microwaves, Millimeter and Submillimeter Waves (MSMW) ◽

10.1109/msmw.2016.7538130 ◽

2016 ◽

Author(s):

Konstantin A. Lukin ◽

Dmytro N. Tatyanko ◽

Alona B. Pikh

Keyword(s):

Thin Film ◽

Film Thickness ◽

Thickness Measurement ◽

Thin Film Thickness ◽

Spectral Interferometry ◽

Film Thickness Measurement

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A method of measuring small frequency change and its application to two methods of thin film thickness measurement

Journal of Physics E Scientific Instruments ◽

10.1088/0022-3735/2/1/436 ◽

1969 ◽

Vol 2 (1) ◽

pp. 111-112

Author(s):

J S Osborn

Keyword(s):

Thin Film ◽

Film Thickness ◽

Thickness Measurement ◽

Frequency Change ◽

Small Frequency ◽

Thin Film Thickness ◽

Film Thickness Measurement

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Thin film thickness measurement using silver-modified Newton's ring

Vacuum ◽

10.1016/0042-207x(63)91089-3 ◽

1963 ◽

Vol 13 (8) ◽

pp. 324

Keyword(s):

Thin Film ◽

Film Thickness ◽

Thickness Measurement ◽

Thin Film Thickness ◽

Film Thickness Measurement

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Study of thin film thickness measurement based on white light interference

10.1117/12.2257412 ◽

2017 ◽

Author(s):

Yuanbo Zheng ◽

Chunxiao Chu ◽

Xia Wang

Keyword(s):

Thin Film ◽

Film Thickness ◽

White Light ◽

Thickness Measurement ◽

Thin Film Thickness ◽

Light Interference ◽

White Light Interference ◽

Film Thickness Measurement

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