Preparation of silicon oxynitride (SiOxNy) thin films by pulsed laser deposition
Keyword(s):
2002 ◽
Vol 20
(3)
◽
pp. 1157-1161
◽
Keyword(s):
2001 ◽
Vol 11
(PR11)
◽
pp. Pr11-65-Pr11-69
2001 ◽
Vol 11
(PR11)
◽
pp. Pr11-133-Pr11-137
Keyword(s):
2008 ◽
Vol 23
(3)
◽
pp. 553-556
◽
2021 ◽
Vol 127
◽
pp. 105716
2021 ◽
Vol 1095
(1)
◽
pp. 012009
Keyword(s):
2010 ◽
Vol 75
◽
pp. 202-207