Studies of particle induced X-ray emission (PIXE) have been widespread and detailed in recent years and despite the fact that most data obtained are from low energy 1–3 MeV experiments, the value of higher energy proton work with its emphasis on K X-ray emission has become more marked as time has progressed. The purpose of this review paper is to outline the history of analysis using high energy protons and to compare and contrast the results obtained with those from lower energy analysis using more firmly established analytical techniques. The work described will concentrate exclusively on proton induced processes and will attempt to outline the rationale for selecting an energy, greater than 20 and up to 70 MeV protons for initiating particles. The relative ease and accuracy of the measurements obtained will be addressed. Clearly such X-ray studies should be seen as complementing low energy work in many instances rather than competing directly with them. However, it will be demonstrated that above a Z value of approximately 20, K X-ray analysis using high energy protons is the only way to go in this type of analysis.
Depth profiling of low energy ion implantations in Si and Ge by means of micro-focused grazing emission X-ray fluorescence and grazing incidence X-ray fluorescence