Iterative reduction of gain variations in parallel electron energy loss spectrometry

1993 ◽  
Vol 49 (1-4) ◽  
pp. 179-188 ◽  
Author(s):  
Peter Schattschneider ◽  
Peter Jonas
Keyword(s):  
Energy Loss ◽  
Electron Energy ◽  
Electron Energy Loss Spectrometry ◽  
Electron Energy Loss

In Situ Analysis of Surface Contaminant Desorption during Low-Temperature Silicon Substrate Cleaning using Reflection Electron Energy Loss Spectrometry

1992 ◽  
Vol 259 ◽  
Author(s):  
Selmer S. Wong ◽  
Shouleh Nikzad ◽  
Channing C. Ahn ◽  
Aimee L. Smith ◽  
Harry A. Atwater
Keyword(s):  
Low Temperature ◽  
Energy Loss ◽  
Electron Energy ◽  
Core Loss ◽  
Temperature Dependent ◽  
Electron Energy Loss Spectrometry ◽  
Analysis Technique ◽  
Chemical Analysis Technique ◽  
Electron Energy Loss

ABSTRACTWe have employed reflection electron energy loss spectrometry (REELS), a surface chemical analysis technique, in order to analyze contaminant coverages at the submonolayer level during low-temperature in situ cleaning of hydrogen-terminated Si(100). The chemical composition of the surface was analyzed by measurements of the C K, O K and Si L2,3 core loss intensities at various stages of the cleaning. These results were quantified using SiC(100) and SiO2 as reference standards for C and O coverage. Room temperature REELS core loss intensity analysis after sample insertion reveals carbon at fractional monolayer coverage. We have established the REELS detection limit for carbon coverage to be 5±2% of a monolayer. A study of temperature-dependent hydrocarbon desorption from hydrogen-terminated Si(100) reveals the absence of carbon on the surface at temperatures greater than 200°C. This indicates the feasibility of epitaxial growth following an in situ low-temperature cleaning and also indicates the power of REELS as an in situ technique for assessment of surface cleanliness.

Investigations of core level states in epitaxial grown Si layers by electron energy loss spectrometry

2018 ◽  
pp. 37-40
Author(s):  
M Stöger-Pollach ◽  
C Hébert ◽  
E C Karl-Rückert ◽  
P Schattschneider ◽  
B Rau ◽  
...  
Keyword(s):  
Energy Loss ◽  
Electron Energy ◽  
Core Level ◽  
Electron Energy Loss Spectrometry ◽  
Electron Energy Loss

Electron energy loss spectrometry of interstellar diamonds

1990 ◽  
Vol 359 ◽  
pp. 246 ◽  
Author(s):  
Thomas J. Bernatowicz ◽  
Patrick C. Gibbons ◽  
Roy S. Lewis
Keyword(s):  
Energy Loss ◽  
Electron Energy ◽  
Electron Energy Loss Spectrometry ◽  
Electron Energy Loss

scholarly journals Electron energy-loss spectrometry on lithiated graphite

2000 ◽  
Vol 77 (2) ◽  
pp. 238-240 ◽  
Author(s):  
A. Hightower ◽  
C. C. Ahn ◽  
B. Fultz ◽  
P. Rez
Keyword(s):  
Energy Loss ◽  
Electron Energy ◽  
Electron Energy Loss Spectrometry ◽  
Electron Energy Loss

Characterization of hard carbon films by electron energy loss spectrometry

1979 ◽  
Vol 61 (2) ◽  
pp. L1-L4 ◽  
Author(s):  
Chr. Weissmantel ◽  
K. Bewilogua ◽  
C. Schürer ◽  
K. Breuer ◽  
H. Zscheile
Keyword(s):  
Energy Loss ◽  
Electron Energy ◽  
Carbon Films ◽  
Hard Carbon ◽  
Electron Energy Loss Spectrometry ◽  
Electron Energy Loss
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