The Atomic Structure and Atomic Layer Compositional Analysis of Thin Solid Films Using the Time-of-Flight Atom-Probe Field Ion Microscopy

Author(s):  
T.T. TSONG
1989 ◽  
Vol 4 (6) ◽  
pp. 1549-1559 ◽  
Author(s):  
Tien T. Tsong ◽  
Chong-lin Chen ◽  
Jiang Liu

Our recent applications of the atom-probe field ion microscope to the study of physics and chemistry of materials at the atomic level are summarized. The materials applicability of field ion microscopy has recently been extended to silicon, silicide, graphite, high Tc superconductors, and other materials. Atom-probe field ion microscopy has been used for atomic layer by atomic layer chemical analysis of surfaces in alloy and impurity segregations, for analyzing the compositional changes across metal-semiconductor interfaces, and for studying formation of cluster ions in laser stimulated field desorption. The energetics of atoms in solids and on surfaces can be studied by a direct kinetic energy analysis of field desorbed ions using a high resolution pulsed-laser time-of-flight atom-probe and by other field ion microscope measurements. The site specific binding energy of surface atoms can be measured at low temperature, where the atomic structure of the surface is still perfectly defined, to an accuracy of about 0.1 to 0.3 eV.


1992 ◽  
Vol 295 ◽  
Author(s):  
M. K. Miller ◽  
Raman Jayaram

AbstractThe near atomic spatial resolution of the atom probe field ion microscope permits the elemental characterization of internal interfaces, grain boundaries and surfaces to be performed in a wide variety of materials. Information such as the orientation relationship between grains, topology of the interface, and the coherency of small precipitates with the surrounding matrix may be obtained from field ion microscopy. Details of the solute segregation may be obtained at the plane of the interface and as a function of distance from the interface for all elements simultaneously from atom probe compositional analysis. The capabilities and limitations of the atom probe technique in the characterization of internal interfaces is illustrated with examples of grain boundaries and interphase interfaces in a wide range of materials including intermetallics, model alloys, and commercial steels.


1994 ◽  
Vol 65 (6) ◽  
pp. 1973-1977 ◽  
Author(s):  
D. K. Chan ◽  
B. M. Davis ◽  
D. N. Seidman

1992 ◽  
Vol 107 (3-6) ◽  
pp. 95-104 ◽  
Author(s):  
Manfred Leisch

Sign in / Sign up

Export Citation Format

Share Document