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Improving the laser damage resistance of oxide thin films and multilayers via tailoring ion beam sputtering parameters
Applied Surface Science
◽
10.1016/j.apsusc.2014.09.048
◽
2015
◽
Vol 336
◽
pp. 34-38
◽
Cited By ~ 7
Author(s):
M.B. Cosar
◽
A.E.S. Ozhan
◽
G.H. Aydogdu
Keyword(s):
Thin Films
◽
Ion Beam
◽
Laser Damage
◽
Ion Beam Sputtering
◽
Oxide Thin Films
◽
Damage Resistance
◽
Beam Sputtering
Download Full-text
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References
Energy Band Properties of Hafnium Oxide Thin Films Fabricated by Ion Beam Sputtering Technique
Acta Optica Sinica
◽
10.3788/aos201737.0231001
◽
2017
◽
Vol 37
(2)
◽
pp. 0231001
Author(s):
刘华松 Liu Huasong
◽
王利栓 Wang Lishuan
◽
杨 霄 Yang Xiao
◽
刘丹丹 Liu Dandan
◽
姜承慧 Jiang Chenghui
◽
...
Keyword(s):
Thin Films
◽
Energy Band
◽
Hafnium Oxide
◽
Ion Beam
◽
Ion Beam Sputtering
◽
Oxide Thin Films
◽
Beam Sputtering
Download Full-text
Yttrium oxide thin films, Y2O3, grown by ion beam sputtering on Si
Journal of Physics D Applied Physics
◽
10.1088/0022-3727/33/22/304
◽
2000
◽
Vol 33
(22)
◽
pp. 2884-2889
◽
Cited By ~ 52
Author(s):
R J Gaboriaud
◽
F Pailloux
◽
P Guerin
◽
F Paumier
Keyword(s):
Thin Films
◽
Yttrium Oxide
◽
Ion Beam
◽
Ion Beam Sputtering
◽
Oxide Thin Films
◽
Beam Sputtering
Download Full-text
Laser damage resistance of hafnia thin films deposited by electron beam deposition, reactive low voltage ion plating, and dual ion beam sputtering
Applied Optics
◽
10.1364/ao.47.00c107
◽
2007
◽
Vol 47
(13)
◽
pp. C107
◽
Cited By ~ 32
Author(s):
Laurent Gallais
◽
Jérémie Capoulade
◽
Jean-Yves Natoli
◽
Mireille Commandré
◽
Michel Cathelinaud
◽
...
Keyword(s):
Low Voltage
◽
Ion Beam
◽
Laser Damage
◽
Ion Beam Sputtering
◽
Damage Resistance
◽
Ion Plating
◽
Electron Beam Deposition
◽
Beam Sputtering
◽
Dual Ion Beam Sputtering
◽
Beam Deposition
Download Full-text
Aluminum doped zinc oxide thin films deposited by ion beam sputtering
Journal of Crystal Growth
◽
10.1016/0022-0248(89)90534-4
◽
1989
◽
Vol 96
(2)
◽
pp. 363-368
◽
Cited By ~ 21
Author(s):
M. Ruth
◽
J. Tuttle
◽
J. Goral
◽
R. Noufi
Keyword(s):
Thin Films
◽
Zinc Oxide
◽
Ion Beam
◽
Ion Beam Sputtering
◽
Oxide Thin Films
◽
Beam Sputtering
◽
Aluminum Doped Zinc Oxide
Download Full-text
Preparation of 128 element of IR detector array based on vanadium oxide thin films obtained by ion beam sputtering
Sensors and Actuators A Physical
◽
10.1016/j.sna.2004.06.005
◽
2005
◽
Vol 117
(1)
◽
pp. 110-114
◽
Cited By ~ 12
Author(s):
S.B. Wang
◽
B.F. Xiong
◽
S.B. Zhou
◽
G. Huang
◽
S.H. Chen
◽
...
Keyword(s):
Thin Films
◽
Vanadium Oxide
◽
Ion Beam
◽
Detector Array
◽
Ion Beam Sputtering
◽
Oxide Thin Films
◽
Ir Detector
◽
Beam Sputtering
◽
Vanadium Oxide Thin Films
Download Full-text
Investigation of UV, ns-laser damage resistance of hafnia films produced by electron beam evaporation and ion beam sputtering deposition methods
Journal of Applied Physics
◽
10.1063/5.0053219
◽
2021
◽
Vol 130
(4)
◽
pp. 043103
Author(s):
V. N. Peters
◽
S. R. Qiu
◽
C. Harthcock
◽
R. A. Negres
◽
G. Guss
◽
...
Keyword(s):
Electron Beam
◽
Ion Beam
◽
Electron Beam Evaporation
◽
Laser Damage
◽
Ion Beam Sputtering
◽
Damage Resistance
◽
Sputtering Deposition
◽
Beam Sputtering
Download Full-text
Laser Damage Resistance of HfO^2 Thin Films Deposited by Electron Beam Deposition, Reactive Low Voltage Ion Plating and Dual Ion Beam Sputtering
Optical Interference Coatings
◽
10.1364/oic.2007.fb3
◽
2007
◽
Author(s):
Laurent Gallais
◽
Jeremie Capoulade
◽
Jean-Yves Natoli
◽
Mireille Commandre
◽
Michel Cathelinaud
◽
...
Keyword(s):
Low Voltage
◽
Ion Beam
◽
Laser Damage
◽
Ion Beam Sputtering
◽
Damage Resistance
◽
Ion Plating
◽
Electron Beam Deposition
◽
Beam Sputtering
◽
Dual Ion Beam Sputtering
◽
Beam Deposition
Download Full-text
Properties of silicon and aluminum oxide thin films deposited by dual ion beam sputtering
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
◽
10.1116/1.574507
◽
1987
◽
Vol 5
(4)
◽
pp. 1824-1827
◽
Cited By ~ 21
Author(s):
G. Emiliani
◽
S. Scaglione
Keyword(s):
Thin Films
◽
Aluminum Oxide
◽
Ion Beam
◽
Ion Beam Sputtering
◽
Oxide Thin Films
◽
Beam Sputtering
◽
Dual Ion Beam Sputtering
Download Full-text
Comparative study of IR and UV laser damage resistance of silica thin films deposited by electron beam deposition, ion plating, ion assisted deposition and dual ion beam sputtering
10.1117/12.624643
◽
2005
◽
Author(s):
Laurent Gallais
◽
Hélène Krol
◽
Jérémie Capoulade
◽
Michel Cathelinaud
◽
Luc Roussel
◽
...
Keyword(s):
Ion Beam
◽
Laser Damage
◽
Uv Laser
◽
Ion Beam Sputtering
◽
Damage Resistance
◽
Ion Plating
◽
Electron Beam Deposition
◽
Beam Sputtering
◽
Dual Ion Beam Sputtering
◽
Beam Deposition
Download Full-text
Preparation of Tantalum Oxide thin films on Si substrate by ion beam sputtering
Laser and Ion Beam Modification of Materials
◽
10.1016/b978-0-444-81994-9.50091-9
◽
1994
◽
pp. 435-438
Author(s):
Yoshihiko SUZUKI
◽
Hidekazu HASHIMA
◽
Kouji INOUE
◽
Souichi OGAWA
◽
Sadao NAKAJIMA
Keyword(s):
Thin Films
◽
Ion Beam
◽
Tantalum Oxide
◽
Ion Beam Sputtering
◽
Si Substrate
◽
Oxide Thin Films
◽
Beam Sputtering
Download Full-text
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