Single walled carbon nanotubes (SWNTs) decorated with polyhedral oligomeric silsesquioxane (POSS) were synthesized via the amide linkages between the acid treated SWNTs and amine-functionalized POSS. The successful modification of SWNTs with POSS was confirmed by Fourier transform infrared spectroscopy (FTIR), X-ray photoelectron spectroscopy (XPS), and UV-Vis spectra. The resulting SWNTs-POSS can be dispersed in both water and organic solutions. The biocompatibility and cytotoxicity of the SWNTs and SWNTs-POSS were evaluated by CCK-8 viability assays, which indicated that SWNTs-POSS exhibit very extremely low toxicity. The low toxicity of the POSS modified SWNTs leads to more opportunities for using carbon nanotubes in biomedical fields.