Multiscale computational fluid dynamics modeling of thermal atomic layer deposition with application to chamber design
2019 ◽
Vol 147
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pp. 529-544
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2021 ◽
Vol 181
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pp. 121854
2020 ◽
Vol 142
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pp. 107066
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2018 ◽
Vol 10
(1)
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pp. 1-21
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2011 ◽
Vol 66
(4)
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pp. 755-765
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2014 ◽
Vol 450
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pp. 207-214
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2001 ◽
Vol 62
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pp. 141-148
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Vol 31
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pp. 402-411