Improved performance of thermochromic VO2/SiO2 coatings prepared by low-temperature pulsed reactive magnetron sputtering: Prediction and experimental verification

2018 ◽  
Vol 767 ◽  
pp. 46-51 ◽  
Author(s):  
D. Kolenaty ◽  
J. Houska ◽  
J. Vlcek
Keyword(s):  
Low Temperature ◽  
Magnetron Sputtering ◽  
Experimental Verification ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Improved Performance

Cubic Silicon Carbide Films Grown by Reactive Magnetron Sputtering at Relatively Low Temperature

1999 ◽  
Vol 67-68 ◽  
pp. 477-484
Author(s):  
S. Kerdiles ◽  
F. Gourbilleau ◽  
Richard Rizk ◽  
J.L. Pérez-Rodríguez ◽  
B. Garrido ◽  
...  
Keyword(s):  
Silicon Carbide ◽  
Low Temperature ◽  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Cubic Silicon Carbide

Crystallization of alumina films deposited by reactive magnetron sputtering with resputtering technique at low temperature

2013 ◽  
Vol 228 ◽  
pp. S393-S396 ◽  
Author(s):  
Xiaopeng Zhang ◽  
Jiaqi Zhu ◽  
Lixia Zhang ◽  
Kikuo Kishimoto ◽  
ShanYi Du ◽  
...  
Keyword(s):  
Low Temperature ◽  
Magnetron Sputtering ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Alumina Films
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