Large modification of crystal–melt interface shape during Si crystal growth by using electromagnetic Czochralski method (EMCZ)

2006 ◽  
Vol 292 (2) ◽  
pp. 252-256 ◽  
Author(s):  
Masahito Watanabe ◽  
Daniel Vizman ◽  
Jochen Friedrich ◽  
Georg Müller
1960 ◽  
Vol 38 (3) ◽  
pp. 439-443 ◽  
Author(s):  
W. D. Edwards

A study has been made of the macroscopic structure of the liquid–solid interface which exists during growth of silicon crystals by the Czochralski method. In two crystals the interface was seen to contain a (111) facet. The development of such facets is discussed with reference to current crystal growth theories.


2012 ◽  
Vol 55 (25-26) ◽  
pp. 8003-8009 ◽  
Author(s):  
Haisheng Fang ◽  
Jun Tian ◽  
Quanjiang Zhang ◽  
Yaoyu Pan ◽  
Sen Wang

Crystals ◽  
2020 ◽  
Vol 11 (1) ◽  
pp. 25
Author(s):  
Xia Tang ◽  
Botao Liu ◽  
Yue Yu ◽  
Sheng Liu ◽  
Bing Gao

The difficulties in growing large-size bulk β-Ga2O3 single crystals with the Czochralski method were numerically analyzed. The flow and temperature fields for crystals that were four and six inches in diameter were studied. When the crystal diameter is large and the crucible space becomes small, the flow field near the crystal edge becomes poorly controlled, which results in an unreasonable temperature field, which makes the interface velocity very sensitive to the phase boundary shape. The effect of seed rotation with increasing crystal diameter was also studied. With the increase in crystal diameter, the effect of seed rotation causes more uneven temperature distribution. The difficulty of growing large-size bulk β-Ga2O3 single crystals with the Czochralski method is caused by spiral growth. By using dynamic mesh technology to update the crystal growth interface, the calculation results show that the solid–liquid interface of the four-inch crystal is slightly convex and the center is slightly concave. With the increase of crystal growth time, the symmetry of cylindrical crystal will be broken, which will lead to spiral growth. The numerical results of the six-inch crystal show that the whole solid–liquid interface is concave and unstable, which is not conducive to crystal growth.


2016 ◽  
Vol 449 ◽  
pp. 114-118 ◽  
Author(s):  
Magdalena Wencka ◽  
Mirtha Pillaca ◽  
Peter Gille

1997 ◽  
Vol 173 (3-4) ◽  
pp. 492-502 ◽  
Author(s):  
G.H. Yeoh ◽  
G. de Vahl Davis ◽  
E. Leonardi ◽  
H.C. de Groh ◽  
M. Yao

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