A mathematical approach for analyzing ultra precision positioning system with compliant mechanism

2005 ◽  
Vol 164-165 ◽  
pp. 1584-1589 ◽  
Author(s):  
S.R. Park ◽  
S.H. Yang
Keyword(s):  
Compliant Mechanism ◽  
Positioning System ◽  
Mathematical Approach ◽  
Precision Positioning ◽  
Ultra Precision

Modeling and Validation of Ultra Precision Positioning System

2011 ◽  
Vol 87 ◽  
pp. 200-205 ◽  
Author(s):  
Jing Shu Wang ◽  
Li Ting Sun ◽  
Ming Chi Feng ◽  
Chang An Zhu
Keyword(s):  
Rigid Body ◽  
Elastic Body ◽  
Stable State ◽  
Least Square ◽  
Positioning System ◽  
Precision Positioning ◽  
Unknown Parameters ◽  
Body Model ◽  
Rigid Body Model ◽  
Ultra Precision

Base on the significance of understanding research objects, modeling and validation of ultra precision positioning system is studied in this paper. Taking different reduction methods of leaf springs into consideration, a rigid body model and an elastic body model has been developed. Identifying unknown parameters by the least square method, the validation results of two models are compared. The conclusion indicates that the elastic body model is better when the dynamic characteristics of the positioning system before the stable state are concerned and the rigid body model is more appropriate if the accuracy of the whole model is focused.

Modeling and Control of Ultra Precision Positioning System for a Grating Ruling Machine

2011 ◽  
Vol 110-116 ◽  
pp. 2647-2654
Author(s):  
Yuan Shen ◽  
Dong Cai Liu ◽  
Guo Fu Lian ◽  
Jie Guo ◽  
Chan Gan Zhu
Keyword(s):  
Hybrid Control ◽  
System Modeling ◽  
Positioning System ◽  
Precision Positioning ◽  
Positional Accuracy ◽  
Modeling And Control ◽  
Control Scheme ◽  
Positioning Stage ◽  
Ultra Precision ◽  
Long Stroke

This paper presents a system modeling based control scheme of an ultra precision positioning system for a grating ruling machine. Since the positioning system having a long stroke with ultra precision, the positioning system consists of a coarse positioning stage driven by a servo motor and a fine positioning stage driven by a piezoelectric ceramic. In order to improve positional accuracy and remove the noise components of motion, a hybrid control scheme based on the system modeling is implemented. Considering position-dependent and time-dependent behaviors of the stages, a model based LQ controller is utilized to the coarse stage and a PID feedback controller based on neural network is utilized to the fine stage. Experiment results reveal the efficient and robust of the control scheme and show that the positional accuracy has been readily achieved within 8.6 nm.

Structural Feature-Based Model Templates Design for Ultra-Precision Positioning System

2011 ◽  
Vol 346 ◽  
pp. 272-279
Author(s):  
Wen Chuan Jia ◽  
Xin Luo ◽  
Fang Yuan ◽  
Lei Zhou ◽  
Wei Jiang
Keyword(s):  
Computer Aided Design ◽  
Vibration Isolation ◽  
Design Method ◽  
Design Parameters ◽  
Positioning System ◽  
Precision Positioning ◽  
Scheme Design ◽  
Dynamical Parameters ◽  
Ultra Precision ◽  
Electromechanical Equipment

Ultra-precision mechanism lies in the core of ultra-precision electromechanical equipment, and is characterized by direct electromagnetic driving, air bearing supporting and ultra-precise vibration-isolation, putting a great challenge on design methodology and tools. This paper presents a model template design method which can provide effective computer aided design and engineering tools for new system design by encapsulating the design methods and design experience of ultra-precision mechanism into series of design templates. The model template contains toolkits both for forward structural design applied to new systems, and for the analysis and optimization of existing systems, as well as mathematical model and visualization tool in physical domain. The model templates are encapsulated and assembled according to the dynamical parameters and specific design parameters. Using planar electromagnetic drive structure in ultra-precision positioning system as an example, this paper discusses the design scheme of structure’s model template in detail, and introduces fast calculation method for magnetic field and visualization program, as well as forward design method for electromagnetic coil structure. Fast scheme design and analysis for ultra-precision mechanism can be achieved by using design templates.

Study on Precision Positioning System of Two-Dimensional Platform Based on High-Speed and Large-Range

2008 ◽  
Author(s):  
Chuan Yang ◽  
Zhi Zhang
Keyword(s):  
Pid Control ◽  
High Speed ◽  
Large Range ◽  
Experimental Results ◽  
Positioning System ◽  
Two Dimensional ◽  
Precision Positioning ◽  
Positioning Accuracy ◽  
Ultra Precision ◽  
Self Adaptive

A two-dimensional ultra-precision positioning system with high-speed and large-range which can be used for micro-nanometer machining has been studied out in this paper. Macro and micro moving system are used to meet the demands of ultra-precision positioning with high-speed and large-range. According to the demands of macro moving system, a valid control of fuzzy-neuron self-adaptive and weighted PID control algorithm with high speed and high precision is proposed. The experimental results show that the error of repeated positioning accuracy is less than 1 μ m for a random point within the range of 300mm by 300mm under the design load for a carrying test-bed with carrying area of 250mm by 250mm. According to the demands of micro moving system, self-adaptive and fuzzy reasoning PID control system based on neural network is studied for the first time. The experimental results show that repeated positioning accuracy is less than 100nm.

Identification of Dynamic Model for Ultra-Precision Positioning System

2012 ◽  
Vol 190-191 ◽  
pp. 97-100 ◽  
Author(s):  
Hui Chen ◽  
Xing Peng Zhou ◽  
Yong Hong Tan ◽  
Ru Qiong Li ◽  
Ya Hong Zhang ◽  
...  
Keyword(s):  
Least Square Method ◽  
Continuous Functions ◽  
Least Square ◽  
Nonlinear Observer ◽  
Positioning System ◽  
Recursive Least Square ◽  
Precision Positioning ◽  
Piezoceramic Actuator ◽  
Fast Tracking ◽  
Ultra Precision

Abstract: In order to improve the control precision of the piezoceramic actuator in precision position system, a dynamic modeling of Ultra-precision Positioning System is proposed. A two-step identification strategy is adopted in this paper. Step 1: The linear model was identified based on step input response by least square method. Step 2: According to the step.1 result, the designed nonlinear observer was applied to estimate the output of hysteresis by Fast Tracking Differentiator. The polynomials are used consistently approximate continuous functions of f(.) and g(.) in the Duhem modeling based on the theorem of the Weierstrass polynomial approximation theory. Recursive least square methods are developed to identify α and the coefficients of the polynomials in Duhem model. At last , the simulation results show applicability, rapid convergence velocity and high calculation accuracy of the algorithm.

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