NO2-sensing properties of porous WO3 gas sensor based on anodized sputtered tungsten thin film

2012 ◽  
Vol 161 (1) ◽  
pp. 447-452 ◽  
Author(s):  
Jing Zeng ◽  
Ming Hu ◽  
Weidan Wang ◽  
Huiqing Chen ◽  
Yuxiang Qin
Keyword(s):  
Thin Film ◽  
Gas Sensor ◽  
Sensing Properties

Gas‐Sensing Properties of Th / SnO2 Thin‐Film Gas Sensor to Trimethylamine

1999 ◽  
Vol 146 (9) ◽  
pp. 3536-3537 ◽  
Author(s):  
P. H. Wei ◽  
G. B. Li ◽  
S. Y. Zhao ◽  
L. R. Chen
Keyword(s):  
Thin Film ◽  
Gas Sensor ◽  
Gas Sensing ◽  
Sno2 Thin Film ◽  
Sensing Properties ◽  
Gas Sensing Properties

Synthesis, characterization and vapor sensing properties of a novel P(St–co–AN)/MWCNTs–VTES nanocomposite thin film as a gas sensor

2019 ◽  
Vol 116 ◽  
pp. 508-514 ◽  
Author(s):  
Hong-Wei Di ◽  
Xue-Yin Zhang ◽  
Jiang-Ping Cao ◽  
Ting-Ting Lei ◽  
Ze-Lin Yang ◽  
...  
Keyword(s):  
Thin Film ◽  
Gas Sensor ◽  
Nanocomposite Thin Film ◽  
Sensing Properties ◽  
Vapor Sensing

scholarly journals Analysis of the Sensing Properties of a Highly Stable and Reproducible Ozone Gas Sensor Based on Amorphous In-Ga-Zn-O Thin Film

Sensors ◽  
2018 ◽  
Vol 18 (2) ◽  
pp. 163 ◽  
Author(s):  
Chiu-Hsien Wu ◽  
Guo-Jhen Jiang ◽  
Kai-Wei Chang ◽  
Zu-Yin Deng ◽  
Yu-Ning Li ◽  
...  
Keyword(s):  
Thin Film ◽  
Gas Sensor ◽  
Sensing Properties

Ternary CuO:SnO2:ZnO (1:1:1) composite thin film for room temperature gas sensor application

Optik ◽  
2021 ◽  
Vol 234 ◽  
pp. 166615
Author(s):  
S.R. Cynthia ◽  
R. Sivakumar ◽  
C. Sanjeeviraja
Keyword(s):  
Thin Film ◽  
Gas Sensor ◽  
Room Temperature ◽  
Composite Thin Film ◽  
Sensor Application

Ozone and nitrogen dioxide gas sensor based on a nanostructured SrTi0.85Fe0.15O3 thin film

2015 ◽  
Vol 638 ◽  
pp. 374-379 ◽  
Author(s):  
Luís F. da Silva ◽  
Valmor R. Mastelaro ◽  
Ariadne C. Catto ◽  
Carlos A. Escanhoela ◽  
Sandrine Bernardini ◽  
...  
Keyword(s):  
Thin Film ◽  
Nitrogen Dioxide ◽  
Gas Sensor

Measurements of Residual Stress in the Layers of Thin Film Micro-Gas Sensors

2000 ◽  
Vol 657 ◽  
Author(s):  
Youngman Kim ◽  
Sung-Ho Choo
Keyword(s):  
Thin Film ◽  
Mechanical Properties ◽  
Residual Stress ◽  
Gas Sensor ◽  
Gas Sensors ◽  
Micro Gas Sensor ◽  
Thin Film Layer ◽  
Film Layer ◽  
The Difference ◽  
Stress States

ABSTRACTThe mechanical properties of thin film materials are known to be different from those of bulk materials, which are generally overlooked in practice. The difference in mechanical properties can be misleading in the estimation of residual stress states in micro-gas sensors with multi-layer structures during manufacturing and in service.In this study the residual stress of each film layer in a micro-gas sensor was measured according to the five difference sets of film stacking structure used for the sensor. The Pt thin film layer was found to have the highest tensile residual stress, which may affect the reliability of the micro-gas sensor. For the Pt layer the changes in residual stress were measured as a function of processing variables and thermal cycling.

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