Improvements of plasma immersion ion implantation (PIII) and deposition (PIII&D) processing for materials surface modification
2013 ◽
Vol 229
◽
pp. 97-104
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2004 ◽
Vol 186
(1-2)
◽
pp. 204-208
◽
2006 ◽
Vol 17
(11-12)
◽
pp. 898-901
◽
2011 ◽
Vol 24
(4)
◽
pp. 461-467
◽
2004 ◽
Vol 186
(1-2)
◽
pp. 295-298
◽
2006 ◽
Vol 248
(1)
◽
pp. 67-70
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Keyword(s):
2001 ◽
Vol 121
(5)
◽
pp. 308-311
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