Room temperature plasma oxidation: A new process for preparation of ultrathin layers of silicon oxide, and high dielectric constant materials

2006 ◽  
Vol 496 (2) ◽  
pp. 546-554 ◽  
Author(s):  
J.C. Tinoco ◽  
M. Estrada ◽  
H. Baez ◽  
A. Cerdeira
Keyword(s):  
Dielectric Constant ◽  
Room Temperature ◽  
Silicon Oxide ◽  
High Dielectric Constant ◽  
Plasma Oxidation ◽  
Temperature Plasma ◽  
Ultrathin Layers ◽  
New Process ◽  
High Dielectric Constant Materials ◽  
High Dielectric

Atomistic prediction on the configuration- and temperature-dependent dielectric constant of Be0.25Mg0.75O superlattice as a high-κ dielectric layer

2021 ◽  
Author(s):  
Gyuseung Han ◽  
In Won Yeu ◽  
Kun Hee Ye ◽  
Seung-Cheol Lee ◽  
Cheol Seong Hwang ◽  
...  
Keyword(s):  
Dielectric Constant ◽  
Dft Calculations ◽  
Bond Length ◽  
Dielectric Layer ◽  
Room Temperature ◽  
High Dielectric Constant ◽  
Temperature Dependent ◽  
High Dielectric

Through DFT calculations, a Be0.25Mg0.75O superlattice having long apical Be–O bond length is proposed to have a high bandgap (>7.3 eV) and high dielectric constant (∼18) at room temperature and above.

Engineering High Dielectric Constant Materials for Band-Edge CMOS Applications

2019 ◽  
Vol 16 (5) ◽  
pp. 19-26 ◽  
Author(s):  
Hemanth Jagannathan ◽  
Vijay Narayanan ◽  
Stephen Brown
Keyword(s):  
Dielectric Constant ◽  
High Dielectric Constant ◽  
Band Edge ◽  
High Dielectric Constant Materials ◽  
High Dielectric

ABSORPTION IN A DIELECTRIC SLAB

1958 ◽  
Vol 36 (4) ◽  
pp. 456-461 ◽  
Author(s):  
M. P. Bachynski
Keyword(s):  
Dielectric Constant ◽  
Incident Energy ◽  
High Dielectric Constant ◽  
Angle Of Incidence ◽  
Dielectric Slab ◽  
Absorbed Energy ◽  
Half Wavelength ◽  
High Dielectric Constant Materials ◽  
High Dielectric ◽  
Electrical Thickness

The amount of incident energy transmitted, reflected, and absorbed by a parallel slab of lossy, high-dielectric-constant material is derived. The results are general for any angle of incidence, and calculations are presented for some lossy, high-dielectric-constant materials of one-half wavelength electrical thickness. At angles of incidence greater than 60°, the reflected energy is found to be the smaller the lossier the material. The absorbed energy is a maximum at certain angles of incidence which depend upon the polarization and dielectric constant.

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