Syntheses and characterization of TiC/a:C composite coatings using pulsed closed field unbalanced magnetron sputtering (P-CFUBMS)

2008 ◽  
Vol 517 (3) ◽  
pp. 1131-1135 ◽  
Author(s):  
J. Lin ◽  
J.J. Moore ◽  
B. Mishra ◽  
M. Pinkas ◽  
W.D. Sproul
Keyword(s):  
Magnetron Sputtering ◽  
Composite Coatings ◽  
Closed Field ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron

Characterization of Titanium and Niobium Doped DLC Films Grown by Pulsed DC PVD: Closed Field Unbalanced Magnetron Sputtering (CFUBMS) Method

2007 ◽  
Author(s):  
Deniz Ugur ◽  
Ihsan Efeoglu ◽  
Sabri Altintas
Keyword(s):  
Magnetron Sputtering ◽  
High Speed ◽  
High Speed Steel ◽  
Closed Field ◽  
X Ray ◽  
Unbalanced Magnetron Sputtering ◽  
Pulsed Dc ◽  
Unbalanced Magnetron ◽  
Scratch Tests

In this research, structural, tribological and mechanical characterization of Nb and Ti doped diamond like carbon (DLC) films was carried out. Films were grown on M2 high speed steel (HSS), glass and silicon wafer substrates by pulsed DC physical vapor deposition – closed field unbalanced magnetron sputtering (PVD-CFUBMS) method. Structural characterization of the coatings was done by using Scanning Electron Microscopy (SEM), X-ray diffraction (XRD) and X-Ray Photoelectron Spectroscopy (XPS) tests. Tribological characterization was completed by conducting pin on disk tests, scratch tests and surface profilometry analyses on wear scars. Hardness measurements were done with nanoindentation tests. It was noted that there existed excellent adhesion between the coating and the substrate, which is evidenced by the high critical loads reached in scratch tests.

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