Effects of amino-terminated self-assembled monolayers on nucleation and growth of chemical vapor-deposited copper films
Keyword(s):
2005 ◽
Vol 127
(40)
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pp. 13744-13745
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Keyword(s):
2006 ◽
Vol 153
(3)
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pp. C142
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Keyword(s):
2006 ◽
Vol 12
(11)
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pp. 679-684
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Keyword(s):
2008 ◽
Vol 112
(6)
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pp. 2091-2098
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