Direct liquid injection chemical vapor deposition of platinum doped cerium oxide thin films
Keyword(s):
Chemical vapor deposition of ruthenium oxide thin films from Ru(tmhd)3 using direct liquid injection
2002 ◽
Vol 413
(1-2)
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pp. 237-242
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2017 ◽
Vol 19
(8)
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pp. 1700193
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2012 ◽
Vol 345
(1)
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pp. 44-50
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2004 ◽
Vol 7
(4-6)
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pp. 331-335
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2000 ◽
Vol 18
(5)
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pp. 2400
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Keyword(s):
2017 ◽
Vol 19
(12)
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pp. 1700425
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1999 ◽
Vol 2
(10)
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pp. 510
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2002 ◽
Vol 149
(1)
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pp. C23
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Keyword(s):