The structure and properties of amorphous diamond-like carbon films deposited by helicon wave plasma chemical vapor deposition

2020 ◽  
Vol 709 ◽  
pp. 138167
Author(s):  
Jia-li Chen ◽  
Pei-yu Ji ◽  
Yan Yang ◽  
Cheng-gang Jin ◽  
Lan-jian Zhuge ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Structure And Properties ◽  
Plasma Chemical ◽  
Plasma Chemical Vapor Deposition ◽  
Helicon Wave ◽  
Helicon Wave Plasma

Synthesis of Diamond-Like Carbon Films by Nanopulse Plasma Chemical Vapor Deposition in Open Air

2005 ◽  
Vol 44 (No. 52) ◽  
pp. L1573-L1575 ◽  
Author(s):  
Yoshimasa Kondo ◽  
Takao Saito ◽  
Tatsuya Terazawa ◽  
Masanori Saito ◽  
Naoto Ohtake
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Plasma Chemical ◽  
Plasma Chemical Vapor Deposition
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