Numerical modeling of the effect of mirror magnetic field strength on electron distributions in electron cyclotron resonance plasma sources

2020 ◽  
Vol 714 ◽  
pp. 138396
Author(s):  
Bin Zhang ◽  
Xiaobing Zhang
2002 ◽  
Vol 41 (Part 1, No. 6A) ◽  
pp. 3926-3929 ◽  
Author(s):  
Masashi Imanaka ◽  
Tetsuro Kurita ◽  
Masatoshi Tukada ◽  
Takahide Nakagawa ◽  
Masanori Kidera ◽  
...  

1974 ◽  
Vol 52 (22) ◽  
pp. 2246-2249 ◽  
Author(s):  
H. W. H. Van Andel ◽  
M. T. Churchland ◽  
G. Calabrese

A plasma produced by a helical RF structure of the Lisitano type is investigated. Measurements of electron density, electron temperature, and plasma stability are reported as a function of RF frequency and power, magnetic field strength and geometry, and neutral argon pressure. It is concluded that at moderate power (~20 W), electron cyclotron resonance is important in the power absorption process.


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