Dynamic identification of electrostatically actuated MEMS in the frequency domain
2010 ◽
Vol 24
(6)
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pp. 1621-1633
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2003 ◽
Vol 14
(4)
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pp. 329-341
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1990 ◽
Vol 137
(1)
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pp. 41
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2015 ◽
Vol 3
(4)
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pp. 55-67