Dynamic identification of electrostatically actuated MEMS in the frequency domain

2010 ◽  
Vol 24 (6) ◽  
pp. 1621-1633 ◽  
Author(s):  
G. De Pasquale ◽  
A. Somà
1990 ◽  
Vol 26 (8) ◽  
pp. 1863-1863
Author(s):  
Paul Marschall ◽  
Baldur Barczewski
Keyword(s):  

2018 ◽  
pp. 40-43
Author(s):  
V.V. GRIGORIEV ◽  
◽  
V.E. KRAVTSOV ◽  
A.K. MITUEV ◽  
E.A. MOROZ ◽  
...  

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