Plasma doping optimization for ultra-shallow junctions
1997 ◽
Vol 121
(1-4)
◽
pp. 216-220
◽
2004 ◽
Vol 114-115
◽
pp. 358-361
◽
1998 ◽
Vol 38
(9)
◽
pp. 1485-1488
◽
2004 ◽
Vol 186
(1-2)
◽
pp. 17-20
◽
2002 ◽
Vol 156
(1-3)
◽
pp. 229-236
◽