Depth profiling: RBS versus energy-dispersive X-ray imaging using scanning transmission electron microscopy

2000 ◽  
Vol 161-163 ◽  
pp. 221-226 ◽  
Author(s):  
Andreas Markwitz
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Scanning Transmission Electron Microscopy ◽  
Depth Profiling ◽  
Energy Dispersive ◽  
X Ray ◽  
Scanning Transmission Electron ◽  
Transmission Electron ◽  
X Ray Imaging ◽  
Scanning Transmission

Detection of individual atoms with energy dispersive x-ray spectroscopy in scanning transmission electron microscopy

2012 ◽  
Vol 18 (S2) ◽  
pp. 990-991
Author(s):  
D.O. Klenov
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Scanning Transmission Electron Microscopy ◽  
Energy Dispersive ◽  
X Ray ◽  
Scanning Transmission Electron ◽  
Transmission Electron ◽  
Scanning Transmission

Extended abstract of a paper presented at Microscopy and Microanalysis 2012 in Phoenix, Arizona, USA, July 29 – August 2, 2012.

scholarly journals Measurement Error in Atomic-Scale Scanning Transmission Electron Microscopy—Energy-Dispersive X-Ray Spectroscopy (STEM-EDS) Mapping of a Model Oxide Interface

2017 ◽  
Vol 23 (3) ◽  
pp. 513-517 ◽  
Author(s):  
Steven R. Spurgeon ◽  
Yingge Du ◽  
Scott A. Chambers
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Scanning Transmission Electron Microscopy ◽  
Energy Dispersive ◽  
Perovskite Oxide ◽  
Oxide Interface ◽  
X Ray ◽  
Scanning Transmission Electron ◽  
Transmission Electron ◽  
Scanning Transmission

AbstractWith the development of affordable aberration correctors, analytical scanning transmission electron microscopy (STEM) studies of complex interfaces can now be conducted at high spatial resolution at laboratories worldwide. Energy-dispersive X-ray spectroscopy (EDS) in particular has grown in popularity, as it enables elemental mapping over a wide range of ionization energies. However, the interpretation of atomically resolved data is greatly complicated by beam–sample interactions that are often overlooked by novice users. Here we describe the practical factors—namely, sample thickness and the choice of ionization edge—that affect the quantification of a model perovskite oxide interface. Our measurements of the same sample, in regions of different thickness, indicate that interface profiles can vary by as much as 2–5 unit cells, depending on the spectral feature. This finding is supported by multislice simulations, which reveal that on-axis maps of even perfectly abrupt interfaces exhibit significant delocalization. Quantification of thicker samples is further complicated by channeling to heavier sites across the interface, as well as an increased signal background. We show that extreme care must be taken to prepare samples to minimize channeling effects and argue that it may not be possible to extract atomically resolved information from many chemical maps.

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