Growth kinetics study of SiGe alloys deposited by rapid thermal process, very low pressure chemical vapor deposition
1996 ◽
Vol 229
(1)
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pp. 74-78
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Keyword(s):
1993 ◽
Vol 17
(1-3)
◽
pp. 172-180
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Keyword(s):
2002 ◽
Vol 12
(4)
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pp. 69-74
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Keyword(s):
Keyword(s):
2017 ◽
Vol 19
(8)
◽
pp. 1700193
◽
Keyword(s):
Keyword(s):