Infrared and Raman spectroscopic investigation of thin films of AlN and SiC on Si substrates

Vibrational Spectroscopy ◽

10.1016/s0924-2031(98)00076-9 ◽

1999 ◽

Vol 19 (2) ◽

pp. 205-211 ◽

Author(s):

H. Hobert ◽

H.H. Dunken ◽

J. Meinschien ◽

H. Stafast

Keyword(s):

Spectroscopic Investigation ◽

Raman Spectroscopic ◽

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