Microstructure and properties of indium tin oxide thin films deposited by RF-magnetron sputtering

Rare Metals ◽  
2006 ◽  
Vol 25 (4) ◽  
pp. 359-364 ◽  
Author(s):  
S LI ◽  
X QIAO ◽  
J CHEN ◽  
F JIA ◽  
C WU
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Rf Magnetron Sputtering ◽  
Oxide Thin Films ◽  
Microstructure And Properties

Preparation and characteristics of Nb-doped indium tin oxide thin films by RF magnetron sputtering

2012 ◽  
Vol 8 (6) ◽  
pp. 460-463 ◽  
Author(s):  
Shi-na Li ◽  
Rui-xin Ma ◽  
Liang-wei He ◽  
Yu-qin Xiao ◽  
Jun-gang Hou ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Rf Magnetron Sputtering ◽  
Oxide Thin Films

Crystallization of indium tin oxide thin films prepared by RF-magnetron sputtering without external heating

2005 ◽  
Vol 474 (1-2) ◽  
pp. 127-132 ◽  
Author(s):  
Ju-O Park ◽  
Joon-Hyung Lee ◽  
Jeong-Joo Kim ◽  
Sang-Hee Cho ◽  
Young Ki Cho
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Rf Magnetron Sputtering ◽  
Oxide Thin Films ◽  
External Heating

Electrochromic phenomenon in indium–tin oxide thin films deposited by RF magnetron sputtering

2010 ◽  
Vol 518 (21) ◽  
pp. S6-S9 ◽  
Author(s):  
Yasushi Inoue ◽  
Jun Matsui ◽  
Hiroyuki Ishikawa ◽  
Hayato Tsuda ◽  
Osamu Takai
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Rf Magnetron Sputtering ◽  
Oxide Thin Films

Effect of thickness on optoelectrical properties of Nb-doped indium tin oxide thin films deposited by RF magnetron sputtering

2013 ◽  
Vol 9 (3) ◽  
pp. 198-200 ◽  
Author(s):  
Shi-na Li ◽  
Rui-xin Ma ◽  
Chun-hong Ma ◽  
Dong-ran Li ◽  
Yu-qin Xiao ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Rf Magnetron Sputtering ◽  
Oxide Thin Films

Deposition by magnetron sputtering and characterization of indium tin oxide thin films

2007 ◽  
Vol 515 (16) ◽  
pp. 6489-6492 ◽  
Author(s):  
A.V. Mudryi ◽  
A.V. Ivaniukovich ◽  
A.G. Ulyashin
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Oxide Thin Films
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