Surface micro-fabrication of silica glass by excimer laser irradiation of organic solvent

2003 ◽  
Vol 158 (2-3) ◽  
pp. 179-182 ◽  
Author(s):  
Hiroyuki Niino ◽  
Yoshimi Yasui ◽  
Ximing Ding ◽  
Aiko Narazaki ◽  
Tadatake Sato ◽  
...  
Keyword(s):  
Organic Solvent ◽  
Laser Irradiation ◽  
Excimer Laser ◽  
Silica Glass ◽  
Micro Fabrication ◽  
Excimer Laser Irradiation

Photoabsorption of Synthetic Silica Glass under ArF Excimer Laser Irradiation

2001 ◽  
Vol 40 (Part 1, No. 10) ◽  
pp. 5962-5965 ◽  
Author(s):  
Masaru Shimbo ◽  
Toshio Nakajima ◽  
Naoki Tsuji ◽  
Tsutomu Kakuno ◽  
Takashi Obara
Keyword(s):  
Laser Irradiation ◽  
Excimer Laser ◽  
Silica Glass ◽  
Excimer Laser Irradiation ◽  
Arf Excimer Laser

Surface microfabrication of silica glass by excimer laser irradiation of toluene solution

2003 ◽  
Author(s):  
Hiroyuki Niino ◽  
Yoshimi Yasui ◽  
Ximing Ding ◽  
Aiko Narazaki ◽  
Tadatake Sato ◽  
...  
Keyword(s):  
Laser Irradiation ◽  
Excimer Laser ◽  
Silica Glass ◽  
Toluene Solution ◽  
Excimer Laser Irradiation

Effect of the dissolved hydrogen on the densification of synthetic silica glass under ArF excimer laser irradiation

2000 ◽  
Vol 88 (10) ◽  
pp. 6052-6054 ◽  
Author(s):  
Masaru Shimbo ◽  
Toshio Nakajima ◽  
Naoki Tsuji ◽  
Zhou Zhongha ◽  
Hirosi Yamaguch ◽  
...  
Keyword(s):  
Laser Irradiation ◽  
Excimer Laser ◽  
Silica Glass ◽  
Excimer Laser Irradiation ◽  
Dissolved Hydrogen ◽  
Arf Excimer Laser

Surface modification of inorganic solid oxides by excimer laser irradiation

1989 ◽  
Author(s):  
Kaoru Igarashi ◽  
Hideaki Saito ◽  
Tomoo Fujioka ◽  
Satoru Fujitsu ◽  
Kunihito Koumoto ◽  
...  
Keyword(s):  
Surface Modification ◽  
Laser Irradiation ◽  
Excimer Laser ◽  
Solid Oxides ◽  
Excimer Laser Irradiation

Wavelength Dependence of Excimer Laser Irradiation Effects on Ethylene-Tetrafluoroethylene Copolymer

1994 ◽  
Vol 33 (Part 1, No. 8) ◽  
pp. 4764-4768 ◽  
Author(s):  
Yuji Hamada ◽  
Shunichi Kawanishi ◽  
Masanobu Nishii ◽  
Shun'ichi Sugimoto ◽  
Tadashi Yamamoto
Keyword(s):  
Laser Irradiation ◽  
Excimer Laser ◽  
Wavelength Dependence ◽  
Irradiation Effects ◽  
Excimer Laser Irradiation ◽  
Ethylene Tetrafluoroethylene

Phase Variation of Amorphous-Si and Poly-Si Thin Films with Excimer Laser Irradiation

1996 ◽  
Vol 35 (Part 2, No. 11B) ◽  
pp. L1473-L1475 ◽  
Author(s):  
Kuninori Kitahara ◽  
Katsuyuki Suga ◽  
Akito Hara ◽  
Kazuo Nakajima
Keyword(s):  
Thin Films ◽  
Laser Irradiation ◽  
Excimer Laser ◽  
Phase Variation ◽  
Excimer Laser Irradiation ◽  
Amorphous Si

Polycrystalline silicon recrystallized with excimer laser irradiation and impurity doping using ion doping method

1993 ◽  
Vol 73 (7) ◽  
pp. 3271-3275 ◽  
Author(s):  
Yutaka Miyata ◽  
Mamoru Furuta ◽  
Tatsuo Yoshioka ◽  
Tetsuya Kawamura
Keyword(s):  
Laser Irradiation ◽  
Excimer Laser ◽  
Polycrystalline Silicon ◽  
Ion Doping ◽  
Impurity Doping ◽  
Excimer Laser Irradiation
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