High-angle annular dark-field stem imaging: more than just z-contrast!
Following the development of dedicated scanning-transmission electron microscopy (STEM), significant advances have been made in atomic number (Z)-contrast imaging using a high-angle annular detector (HAAD). With the exclusion of coherent (ie. Bragg) scattering, the HAAD allows for truly incoherent imaging with high compositional sensitivity approaching the simple Z2-dependence of unscreened Rutherford scattering. However, recent experimental studies have indicated that HAADF-STEM imaging is not always straightforward. For example, Fig. 1 shows a digitally acquired HAADF-STEM image of a (B,As)-doped Si multilayer. The B-doped (˜ 0.7 at.%B) layers appear significantly brighter than the adjacent Si matrix in contradiction with a simple Z-contrast argument. It was found that an increase in incoherent scattering from the B-doped regions results due to the presence of atomic displacements of the surrounding Si atoms which effectively behave as “frozen-in” static phonons. Accordingly, the B-doped layers quasi-elastically scatter electrons to relatively high angles giving rise to enhanced contrast in HAADF.