Cross-sectional Transmission Electron Microscopy of (AlAs)15(InAs)1 Superlattices
Multibeam and bright field transmission electron microscopy are used to determine the structure of (InAs)1/(AlAs)15 superlattices. The interest of InAs/AlAs system arises from the large gap difference. The main problem in the obtention of strained layer superlattices (SLS), with a large lattice mismach, 7% is that of controlling the growth process to obtain high quality layers with sharp interfaces.A modification of the conventional MBE technique, Atomic Layer Molecular Beam Epitaxy (ALMBE) seems to be very appropiate for the growth of such strained layer structures. In particular, high quality layers of materials that demand different growth conditions by MBE, like InAs and AlAs can be obtained at a common low substrate temperature (350-400°) by ALMBE due to the ability to force 2D or layer by layer nucleation and growth. Present superlattices are part of a series with structure (AlAs)15/(InAs)n (n = 1, 2, 3 and 5 ml) whose study by HREM is under way in order to determine critical thickness limits.