scholarly journals Detection of Arsenic Dopant Atoms in Silicon Crystal by Aberration Corrected Scanning Transmission Electron Microscope

2009 ◽  
Vol 15 (S2) ◽  
pp. 1488-1489
Author(s):  
Y Oshima ◽  
Y Hashimoto ◽  
H Sawada ◽  
N Hashikawa ◽  
K Asayama ◽  
...  
Keyword(s):  
Electron Microscope ◽  
Transmission Electron Microscope ◽  
Silicon Crystal ◽  
Scanning Transmission Electron Microscope ◽  
Scanning Transmission Electron ◽  
Transmission Electron ◽  
Scanning Transmission ◽  
Dopant Atoms ◽  
Aberration Corrected

Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009

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