Volatility by Design. Synthesis and Characterization of Polyether Adducts of Bis(1,1,1,5,5,5-hexafluoro-2,4-pentanedionato)barium and Their Implementation as Metal−Organic Chemical Vapor Deposition Precursors

1997 ◽  
Vol 9 (7) ◽  
pp. 1638-1648 ◽  
Author(s):  
John A. Belot ◽  
Deborah A. Neumayer ◽  
Charles J. Reedy ◽  
Daniel B. Studebaker ◽  
Bruce J. Hinds ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Synthesis And Characterization ◽  
Organic Chemical ◽  
Design Synthesis ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition

Synthesis and characterization of volatile bismuth .beta.-diketonate compounds for metal-organic chemical vapor deposition of thin films

1992 ◽  
Vol 4 (4) ◽  
pp. 912-916 ◽  
Author(s):  
K. C. Brooks ◽  
S. B. Turnipseed ◽  
R. M. Barkley ◽  
R. E. Sievers ◽  
V. Tulchinsky ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Synthesis And Characterization ◽  
Organic Chemical ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition

Growth and characterization of N-polar GaN films on SiC by metal organic chemical vapor deposition

2008 ◽  
Vol 104 (2) ◽  
pp. 024301 ◽  
Author(s):  
David F. Brown ◽  
Stacia Keller ◽  
Feng Wu ◽  
James S. Speck ◽  
Steven P. DenBaars ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition

Preparation and Characterization of Epitaxial LiNbO3Thin Films by Metal-Organic Chemical Vapor Deposition

1999 ◽  
Vol 38 (Part 1, No. 9B) ◽  
pp. 5437-5441 ◽  
Author(s):  
Kosuke Shiratsuyu ◽  
Atsushi Sakurai ◽  
Katsuhiko Tanaka ◽  
Yukio Sakabe
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition

scholarly journals Characterization of YBa2Cu3O7-.DELTA. Films with Different Cu Contents Grown by Metal Organic Chemical Vapor Deposition.

2000 ◽  
Vol 108 (1259) ◽  
pp. 623-626
Author(s):  
Koji ISHIZAWA ◽  
Yutaka YOSHIDA ◽  
Masato HASEGAWA ◽  
Morihiro IWATA ◽  
Katsuya YAMAGIWA ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Metal Organic ◽  
Organic Chemical Vapor Deposition
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