Nano-electro-mechanical systems (NEMS)
Keyword(s):
1998 ◽
Vol 355
(3)
◽
pp. 451-469
◽
Keyword(s):
Keyword(s):
1991 ◽
Vol 161
(2)
◽
pp. 13-75
◽
2011 ◽
Vol 131
(4)
◽
pp. 751-757
◽