Optical properties of a low energy focused ion beam apparatus for direct deposition

1997 ◽  
Vol 68 (6) ◽  
pp. 2331-2338
Author(s):  
Shinji Nagamachi ◽  
Masahiro Ueda ◽  
Yasuhiro Yamakage ◽  
Hiromasa Maruno ◽  
Junzo Ishikawa
Keyword(s):  
Optical Properties ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Low Energy ◽  
Direct Deposition

Low-energy focused ion-beam system for direct deposition

1995 ◽  
Author(s):  
Masahiro Ueda ◽  
Shinji Nagamachi ◽  
Yasuhiro Yamakage ◽  
Hiromasa Maruno ◽  
Junzo Ishikawa
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Low Energy ◽  
Direct Deposition ◽  
Beam System

scholarly journals Development of Low Energy Focused Ion Beam System for Direct Deposition.

Shinku ◽  
1993 ◽  
Vol 36 (11) ◽  
pp. 885-888
Author(s):  
Shinji NAGAMACHI ◽  
Yasuhiro YAMAKAGE ◽  
Hiromasa MARUNO ◽  
Masahiro UEDA ◽  
Seiji SUGIMOTO ◽  
...  
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Low Energy ◽  
Direct Deposition ◽  
Beam System

Doping Study on Maskless Selective Direct Growth of GaAs Using Low-Energy Focused Ion Beam

2004 ◽  
Vol 43 (No. 6A) ◽  
pp. L716-L718 ◽  
Author(s):  
Tomokazu Nishiyama ◽  
Eum-Mi Kim ◽  
Kazutoshi Numata ◽  
Kangsa Pak
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Low Energy ◽  
Direct Growth

Low energy focused ion beam milling of silicon and germanium nanostructures

2011 ◽  
Vol 22 (10) ◽  
pp. 105304 ◽  
Author(s):  
Miroslav Kolíbal ◽  
Tomáš Matlocha ◽  
Tomáš Vystavěl ◽  
Tomáš Šikola
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Low Energy ◽  
Silicon And Germanium ◽  
Focused Ion Beam Milling
Sign in / Sign up

Export Citation Format

Share Document