Effect of sheath evolution on metal ion implantation in a vacuum arc plasma source

Journal of Applied Physics ◽

10.1063/1.1331072 ◽

2001 ◽

Vol 89 (2) ◽

pp. 923-927 ◽

Author(s):

M. M. M. Bilek

Keyword(s):

Ion Implantation ◽

Metal Ion ◽

Plasma Source ◽

Metal Ion Implantation

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Plating‐free metal ion implantation utilizing the cathodic vacuum arc as an ion source

Applied Physics Letters ◽

10.1063/1.106449 ◽

1992 ◽

Vol 60 (9) ◽

pp. 1076-1078 ◽

Author(s):

T. Sroda ◽

S. Meassick ◽

C. Chan

Keyword(s):

Ion Implantation ◽

Metal Ion ◽

Free Metal Ion ◽

Metal Ion Implantation

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Advanced vacuum arc metal ion implantation systems

Surface and Coatings Technology ◽

10.1016/s0257-8972(98)80006-6 ◽

1997 ◽

Vol 96 (1) ◽

pp. 1-8 ◽

Author(s):

James R. Treglio ◽

Alexander Elkind ◽

Robert J. Stinner ◽

Anthony J. Perry

Keyword(s):

Ion Implantation ◽

Metal Ion ◽

Metal Ion Implantation

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Surface modification of steel by metal plasma immersion ion implantation using vacuum arc plasma source

Surface and Coatings Technology ◽

10.1016/s0257-8972(99)00427-2 ◽

1999 ◽

Vol 120-121 ◽

pp. 659-662 ◽

Author(s):

Z.M. Zeng ◽

T. Zhang ◽

B.Y. Tang ◽

X.B. Tian ◽

P.K. Chu

Keyword(s):

Surface Modification ◽

Ion Implantation ◽

Plasma Source ◽

Metal Plasma ◽

Plasma Immersion Ion Implantation

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Modification of metals and hard coatings using vacuum-arc metal ion implantation

1998 International Conference on Ion Implantation Technology. Proceedings (Cat. No.98EX144) ◽

10.1109/iit.1998.813807 ◽

2002 ◽

Author(s):

Y.P. Sharkeev ◽

B.P. Gritsenko ◽

S.V. Fortuna ◽

A.J. Perry

Keyword(s):

Ion Implantation ◽

Metal Ion ◽

Hard Coatings ◽

Metal Ion Implantation

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Upgraded vacuum arc ion source for metal ion implantation

Review of Scientific Instruments ◽

10.1063/1.3655529 ◽

2012 ◽

Vol 83 (2) ◽

pp. 02A501 ◽

Author(s):

A. G. Nikolaev ◽

E. M. Oks ◽

K. P. Savkin ◽

G. Yu. Yushkov ◽

I. G. Brown

Keyword(s):

Ion Implantation ◽

Metal Ion ◽

Metal Ion Implantation

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Characteristics and design of metal vacuum arc plasma source power supply for pulsed-mode plasma immersion ion implantation

Review of Scientific Instruments ◽

10.1063/1.1327312 ◽

2000 ◽

Vol 71 (12) ◽

pp. 4435 ◽

Author(s):

L. P. Wang ◽

K. Y. Gan ◽

X. B. Tian ◽

B. Y. Tang ◽

P. K. Chu

Keyword(s):

Ion Implantation ◽

Power Supply ◽

Plasma Source ◽

Source Power ◽

Pulsed Mode ◽

Plasma Immersion Ion Implantation

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Pulsed vacuum arc plasma source of supersonic metal ion flow

Review of Scientific Instruments ◽

10.1063/1.5143503 ◽

2020 ◽

Vol 91 (2) ◽

pp. 023302 ◽

Author(s):

V. P. Frolova ◽

A. G. Nikolaev ◽

E. M. Oks ◽

A. V. Vodopyanov ◽

A. Yu. Yushkov ◽

...

Keyword(s):

Metal Ion ◽

Plasma Source ◽

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Metal ion implantation using a filtered cathodic vacuum arc

Journal of Applied Physics ◽

10.1063/1.373052 ◽

2000 ◽

Vol 87 (9) ◽

pp. 4198-4204 ◽

Author(s):

M. M. M. Bilek ◽

P. Evans ◽

D. R. Mckenzie ◽

D. G. McCulloch ◽

H. Zreiqat ◽

...

Keyword(s):

Ion Implantation ◽

Metal Ion ◽

Filtered Cathodic Vacuum Arc ◽

Metal Ion Implantation

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Coloration of Quartz by Metal-Ion Implantation

Japanese Journal of Applied Physics ◽

10.1143/jjap.24.1115 ◽

1985 ◽

Vol 24 (Part 1, No. 8) ◽

pp. 1115-1116 ◽

Author(s):

Yukinori Saito ◽

Hideo Kumagai ◽

Shinji Suganomata

Keyword(s):

Ion Implantation ◽

Metal Ion ◽

Metal Ion Implantation

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A broad-beam, high-current metal-ion implantation facility

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/0168-583x(91)96221-6 ◽

1991 ◽

Vol 55 (1-4) ◽

pp. 506-510 ◽

Author(s):

I.G. Brown ◽

M.R. Dickinson ◽

J.E. Galvin ◽

X. Godechot ◽

R.A. MacGill

Keyword(s):

Ion Implantation ◽

Metal Ion ◽

High Current ◽

Metal Ion Implantation

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