Surface cleaning of C‐dopedp+GaAs with hydrogen electron cyclotron resonance plasma
1990 ◽
Vol 29
(Part 2, No. 7)
◽
pp. L1181-L1184
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1994 ◽
Vol 12
(4)
◽
pp. 1315-1321
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1993 ◽
Vol 68
(4)
◽
pp. 575-582
◽
1997 ◽
Vol 15
(4)
◽
pp. 1951-1954
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