scholarly journals Two-dimensional strain mapping in semiconductors by nano-beam electron diffraction employing a delay-line detector

2015 ◽  
Vol 107 (7) ◽  
pp. 072110 ◽  
Author(s):  
Knut Müller-Caspary ◽  
Andreas Oelsner ◽  
Pavel Potapov
Keyword(s):  
Electron Diffraction ◽  
Delay Line ◽  
Two Dimensional ◽  
Strain Mapping ◽  
Beam Electron ◽  
Line Detector

Application of convergent beam electron diffraction to two-dimensional strain mapping in silicon devices

2003 ◽  
Vol 82 (13) ◽  
pp. 2172-2174 ◽  
Author(s):  
A. Armigliato ◽  
R. Balboni ◽  
G. P. Carnevale ◽  
G. Pavia ◽  
D. Piccolo ◽  
...  
Keyword(s):  
Electron Diffraction ◽  
Convergent Beam Electron Diffraction ◽  
Two Dimensional ◽  
Strain Mapping ◽  
Beam Electron ◽  
Silicon Devices ◽  
Convergent Beam

scholarly journals Strain mapping at nanometer resolution using advanced nano-beam electron diffraction

2015 ◽  
Vol 106 (25) ◽  
pp. 253107 ◽  
Author(s):  
V. B. Ozdol ◽  
C. Gammer ◽  
X. G. Jin ◽  
P. Ercius ◽  
C. Ophus ◽  
...  
Keyword(s):  
Electron Diffraction ◽  
Strain Mapping ◽  
Nanometer Resolution ◽  
Beam Electron

Low energy electron diffraction using an electronic delay-line detector

2006 ◽  
Vol 77 (2) ◽  
pp. 023302 ◽  
Author(s):  
D. Human ◽  
X. F. Hu ◽  
C. J. Hirschmugl ◽  
J. Ociepa ◽  
G. Hall ◽  
...  
Keyword(s):  
Electron Diffraction ◽  
Delay Line ◽  
Low Energy ◽  
Energy Electron ◽  
Low Energy Electron Diffraction ◽  
Line Detector ◽  
Low Energy Electron

Symmetries and Extinction Rules in CBED

1982 ◽  
Vol 40 ◽  
pp. 684-685
Author(s):  
K. Ishizuka
Keyword(s):  
Electron Diffraction ◽  
Incident Beam ◽  
Convergent Beam Electron Diffraction ◽  
Beam Direction ◽  
Beam Electron ◽  
Convergent Beam

The technique of convergent-beam electron diffraction (CBED) has been established. However there is a distinct discrepancy concerning the CBED pattern symmetries associated with translation symmetries parallel to the incident beam direction: Buxton et al. assumed no detectable effects of translation components, while Goodman predicted no associated symmetries. In this report a procedure used by Gjønnes & Moodie1 to obtain dynamical extinction rules will be extended in order to derive the CBED pattern symmetries as well as the dynamical extinction rules.

A library of convergent-beam electron diffraction patterns

1986 ◽  
Vol 44 ◽  
pp. 688-691
Author(s):  
John F. Mansfield
Keyword(s):  
Electron Diffraction ◽  
Materials Science ◽  
Convergent Beam Electron Diffraction ◽  
Beam Electron ◽  
Transmission Electron ◽  
Yield Information ◽  
Analytical Electron ◽  
Diffraction Patterns ◽  
Convergent Beam ◽  
Electron Energy Loss

One of the most important advancements of the transmission electron microscopy (TEM) in recent years has been the development of the analytical electron microscope (AEM). The microanalytical capabilities of AEMs are based on the three major techniques that have been refined in the last decade or so, namely, Convergent Beam Electron Diffraction (CBED), X-ray Energy Dispersive Spectroscopy (XEDS) and Electron Energy Loss Spectroscopy (EELS). Each of these techniques can yield information on the specimen under study that is not obtainable by any other means. However, it is when they are used in concert that they are most powerful. The application of CBED in materials science is not restricted to microanalysis. However, this is the area where it is most frequently employed. It is used specifically to the identification of the lattice-type, point and space group of phases present within a sample. The addition of chemical/elemental information from XEDS or EELS spectra to the diffraction data usually allows unique identification of a phase.

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