TfC13. Rapid thermal processing of PZT thin films

1992 ◽  
Vol 134 (1) ◽  
pp. 285-290 ◽  
Author(s):  
Y. Huang ◽  
I. M. Reaney ◽  
A. J. Bell
Keyword(s):  
Thin Films ◽  
Thermal Processing ◽  
Rapid Thermal Processing ◽  
Pzt Thin Films

Crystallization Dynamics and Rapid Thermal Processing of PZT Thin Films

1991 ◽  
Vol 243 ◽  
Author(s):  
Jiayu Chen ◽  
Keith G. Brooks ◽  
K.R. Udayakumar ◽  
L. Eric Cross
Keyword(s):  
Thin Films ◽  
Thermal Processing ◽  
Crystallization Process ◽  
Rapid Thermal Processing ◽  
Environmental Scanning Electron Microscopy ◽  
Environmental Scanning ◽  
X Ray Diffraction ◽  
Pzt Thin Films ◽  
Temperature Time

AbstractThe crystallization process of PZT thin films has been studied in situ by means of Environmental Scanning Electron Microscopy ( ESEM ). Based on the ESEM observations, the Rapid Thermal Processing (RTP) technique has been employed to crystallize ferroelectric thin films. Various annealing temperature-time combinations were investigated; the results indicate the crystallization process to be very fast. X-ray diffraction data shows the crystallization to be complete in 10 seconds at 600°C, and in 1 second at 700°C. In comparison with conventionally furnace processed films, the RTP films have comparable ferroelectric and dielectric properties, but are distinguished by superior breakdown strengths and morphologically smoother surface. The relation between microstructure of films and crystallizing parameters has been studied.

Rapid thermal processing of PZT thin films using a new triol based sol-gel route

1999 ◽  
Vol 228 (1) ◽  
pp. 61-78 ◽  
Author(s):  
S. Arscott ◽  
R. E. Miles ◽  
S. J. Milne
Keyword(s):  
Thin Films ◽  
Thermal Processing ◽  
Sol Gel ◽  
Rapid Thermal Processing ◽  
Pzt Thin Films

Rapid thermal processing of zirconia thin films produced by the sol‐gel method

1991 ◽  
Vol 70 (4) ◽  
pp. 2348-2352 ◽  
Author(s):  
R. Pascual ◽  
M. Sayer ◽  
C. V. R. Vasant Kumar ◽  
Lichun Zou
Keyword(s):  
Thin Films ◽  
Thermal Processing ◽  
Sol Gel ◽  
Rapid Thermal Processing ◽  
Gel Method ◽  
Sol Gel Method

Effects of doping and rapid thermal processing in Y doped CdO thin films

2019 ◽  
Vol 776 ◽  
pp. 259-265 ◽  
Author(s):  
Mengting Xie ◽  
Wei Zhu ◽  
Kin Man Yu ◽  
Zishu Zhu ◽  
Guanzhong Wang
Keyword(s):  
Thin Films ◽  
Thermal Processing ◽  
Rapid Thermal Processing ◽  
Cdo Thin Films

scholarly journals Rapid thermal processing of self-assembling block copolymer thin films

2013 ◽  
Vol 24 (31) ◽  
pp. 315601 ◽  
Author(s):  
F Ferrarese Lupi ◽  
T J Giammaria ◽  
M Ceresoli ◽  
G Seguini ◽  
K Sparnacci ◽  
...  
Keyword(s):  
Thin Films ◽  
Block Copolymer ◽  
Thermal Processing ◽  
Rapid Thermal Processing ◽  
Self Assembling

Surface microstructure of CIS thin films produced by rapid thermal processing

1994 ◽  
Vol 35 ◽  
pp. 129-139 ◽  
Author(s):  
W. Riedl ◽  
J. Rimmasch ◽  
V. Probst ◽  
F. Karg ◽  
R. Guckenberger
Keyword(s):  
Thin Films ◽  
Thermal Processing ◽  
Rapid Thermal Processing ◽  
Surface Microstructure

Fine Tuning of Lithographic Masks through Thin Films of PS-b-PMMA with Different Molar Mass by Rapid Thermal Processing

2014 ◽  
Vol 6 (10) ◽  
pp. 7180-7188 ◽  
Author(s):  
Federico Ferrarese Lupi ◽  
Tommaso Jacopo Giammaria ◽  
Gabriele Seguini ◽  
Francesco Vita ◽  
Oriano Francescangeli ◽  
...  
Keyword(s):  
Thin Films ◽  
Thermal Processing ◽  
Molar Mass ◽  
Rapid Thermal Processing ◽  
Fine Tuning ◽  
Lithographic Masks

Effects of rapid thermal processing on chemically deposited antimony sulfide thin films

2018 ◽  
Vol 80 ◽  
pp. 9-17 ◽  
Author(s):  
V. Vinayakumar ◽  
C.R. Obregón Hernández ◽  
S. Shaji ◽  
D.A. Avellaneda ◽  
J.A. Aguilar Martinez ◽  
...  
Keyword(s):  
Thin Films ◽  
Thermal Processing ◽  
Rapid Thermal Processing ◽  
Antimony Sulfide
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