A high intensity pulsed electron beam source

1982 ◽  
Vol 63 (1-4) ◽  
pp. 191-195
Author(s):  
V. K. Rohatgi ◽  
S. K. Iyyengar ◽  
P. H. Ron ◽  
K. C. Mittal ◽  
A. S. Paithankar
Keyword(s):  
Electron Beam ◽  
High Intensity ◽  
Beam Source ◽  
Pulsed Electron Beam

Pulsed electron-beam source for high-resolution high-throughput microlithography

1994 ◽  
Author(s):  
Tseng-Yang Hsu ◽  
Peyman Hadizad ◽  
Rong L. Liou ◽  
Greg Roth ◽  
Martin A. Gundersen
Keyword(s):  
Electron Beam ◽  
High Resolution ◽  
High Throughput ◽  
Beam Source ◽  
Pulsed Electron Beam

Phase Formation Initiated by Irradiation of the Film (Si) – Substrate (Grade 3 Steel) System with a High-Intensity Pulsed Electron Beam

2019 ◽  
Vol 62 (4) ◽  
pp. 673-679
Author(s):  
Yu. F. Ivanov ◽  
A. I. Potekaev ◽  
A. D. Teresov ◽  
E. A. Petrikova ◽  
A. A. Klopotov ◽  
...  
Keyword(s):  
Electron Beam ◽  
Phase Formation ◽  
High Intensity ◽  
Si Substrate ◽  
Pulsed Electron Beam ◽  
Grade 3
Sign in / Sign up

Export Citation Format

Share Document