Kinetic Monte Carlo simulation for the striation distribution of void defects in Czochralski silicon growth
2020 ◽
Vol 1695
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pp. 012016
Keyword(s):
2005 ◽
Vol 38
(23)
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pp. 4202-4209
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Keyword(s):
2009 ◽
Vol 54
(27)
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pp. 6941-6948
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Keyword(s):
2011 ◽
Vol 52
(3)
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pp. 391-396
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