Letter Accurate interferometric system to perform the substrate focusing and alignment in laser writing processes

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Vol 44 (6) ◽  
pp. 1065-1072
Author(s):  
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Juan Felix Roman ◽  
Vicente Moreno
1997 ◽  
Vol 44 (6) ◽  
pp. 1065-1072
Author(s):  
José Ramón Salgueiro ◽  
Juan Félix Román ◽  
Vicente Moreno

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pp. 724-728 ◽  
Author(s):  
Antonio Ambrosio ◽  
Fabio Borbone ◽  
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Roberto Centore ◽  
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2021 ◽  
Vol 99 (4) ◽  
pp. 7-7
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Keyword(s):  
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